Please use this identifier to cite or link to this item:
https://elib.vku.udn.vn/handle/123456789/6021Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Stephen, A. Campbell | - |
| dc.date.accessioned | 2025-12-08T22:45:12Z | - |
| dc.date.available | 2025-12-08T22:45:12Z | - |
| dc.date.issued | 2008 | - |
| dc.identifier.isbn | 978-0-19-532017-6 | - |
| dc.identifier.uri | https://elib.vku.udn.vn/handle/123456789/6021 | - |
| dc.description | pp: 825. | vi_VN |
| dc.language.iso | en | vi_VN |
| dc.publisher | Oxford University Press | vi_VN |
| dc.subject | Fabrication Engineering | vi_VN |
| dc.subject | Micro | vi_VN |
| dc.subject | Nanoscale | vi_VN |
| dc.title | Fabrication Engineering at the Micro and Nanoscale (Third Edition) | vi_VN |
| dc.type | Book | vi_VN |
| Appears in Collections: | Vi mạch bán dẫn | |
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