Please use this identifier to cite or link to this item:
https://elib.vku.udn.vn/handle/123456789/6021| Title: | Fabrication Engineering at the Micro and Nanoscale (Third Edition) |
| Authors: | Stephen, A. Campbell |
| Keywords: | Fabrication Engineering Micro Nanoscale |
| Issue Date: | 2008 |
| Publisher: | Oxford University Press |
| Description: | pp: 825. |
| URI: | https://elib.vku.udn.vn/handle/123456789/6021 |
| ISBN: | 978-0-19-532017-6 |
| Appears in Collections: | Vi mạch bán dẫn |
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